Single-step growth of MoO3 nanorods via magnetron sputtering. Issue 3 (16th December 2022)

• Record Type: Journal Article
• Authors: Gudena, Gutema Teshome; Cho, Hyeon Ho; Megersa, Daba Deme; Lee, Jaeyeong; Bae, Jong Seong; Yu, Hak Ki
• Is Part Of: CrystEngComm. Volume 25:Issue 3(2023)
• Page Start: 378
• Page End: 384
• Publication Date: 2022-12-16
• Subjects: Crystals -- Periodicals; Crystal growth -- Periodicals; Crystallography -- Periodicals; Cristaux -- Périodiques; Cristaux -- Croissance -- Périodiques; Cristallographie -- Périodiques; 548
• DOI: 10.1039/d2ce01450e
• Languages: English
• ISSNs: 1466-8033

Abstract

Abstract : Single-step growth of (0 h 0)-oriented MoO3 nanorods via radio frequency sputtering for humidity sensors. Abstract : Uniformly distributed crystalline α-molybdenum oxide nanorods (NRs) were grown on c -plane sapphire substrates using a single-step radio frequency sputtering technique. The shape and size of the NRs can be controlled by regulating the composition of the sputtering gas (Ar : O2 mixture). A pin-like nanowire structure was observed at an Ar : O2 ratio of 20 : 0, which transformed to NRs at Ar : O2 ratios of 20 : 2 and 20 : 4. Additionally, the length of the NRs increased with an increase in the deposition time. X-ray diffraction and transmission electron microscopy analyses indicated the highly crystalline nature of the NRs. X-ray photoelectron spectroscopy measurements revealed that the NRs were composed of nearly stoichiometric α-MoO3 . Humidity sensing experiments indicated that the as-grown α-MoO3 NRs have good sensitivity to moisture.