Cite
HARVARD Citation
Wang, L. et al. (2023). Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges. Plasma sources science & technology. p. . [Online].
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Wang, L. et al. (2023). Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges. Plasma sources science & technology. p. . [Online].