Effective electromechanical coupling coefficient (keff2) enhancement of a Lamb wave resonator with trapezoid grooves configuration. (1st March 2023)

• Record Type: Journal Article
• Authors: Fan, Yuchen; Zhou, Jie; Xu, Qinwen; Tong, Xin; Xie, Ying; Zou, Yang; Ding, Jiaqi; Gao, Chao; Lin, Binghui; Liu, Wenjuan; Liu, Yan; Cai, Yao; Sun, Chengliang
• Is Part Of: Applied physics express. Volume 16:Number 3(2023)
• Publication Date: 2023-03-01
• Subjects: lamb wave resonator -- effective electromechanical coupling coefficient -- spurious mode supression -- aliminum nitride membrane; Physics -- Periodicals; Technology -- Periodicals; 621.05
• DOI: 10.35848/1882-0786/acbfa0
• Languages: English
• ISSNs: 1882-0778

Abstract

Abstract: A first-order ( S 1 ) Lamb wave resonator (LWR) with a trapezoid grooves configuration on the top surface of the aluminum nitride membrane between interdigital electrodes is proposed in this paper. Both the simulation and experiment results demonstrate that the k e f f 2 can be enhanced with the depth of the trapezoid grooves increasing. Meanwhile, the spurious modes can be suppressed by the trapezoid grooves. A 75% improvement on the k e f f 2 has been achieved in a 2.45 GHz S 1 mode LWR with trapezoid grooves with spurious modes free. The k e f f 2 reaches up to 5.47% without quality factor degradation.