Analysis of longitudinal leaky surface acoustic waves on bonded structures consisting of similar and dissimilar materials. (1st July 2023)

• Record Type: Journal Article
• Authors: Fujii, Yudai; Suzuki, Masashi; Kakio, Shoji
• Is Part Of: Japanese journal of applied physics. Volume 62:Number SJ(2023)
• Publication Date: 2023-07-01
• Subjects: quartz -- surface acoustic wave -- similar and dissimilar material bonded structure; Physics -- Periodicals; 621.05
• DOI: 10.35848/1347-4065/acbb87
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: The propagation and resonance properties of longitudinal leaky surface acoustic waves on structures consisting of a LiTaO3 (LT) thin plate bonded to a quartz (Qz) similar-material bonded structure were investigated theoretically. It was found by surface acoustic wave (SAW) propagation analysis that a small attenuation can be obtained by combining an LT thin plate and a Qz similar-material bonded structure with appropriate Euler angles. Furthermore, regarding SAW resonance analysis, resonances with admittance ratios exceeding 50 dB and Q factors exceeding 1000 were obtained in the LT/Qz/Qz bonded structure. Such a small propagation loss and high Q can be obtained with a larger LT plate thickness than in the case of the LT/Qz bonded structure.