Perturbation analysis of second-order nonlinearity and its effectiveness for radiofrequency bulk acoustic wave devices. (1st July 2023)

• Record Type: Journal Article
• Authors: Ueda, Masanori; Nishizawa, Toshio; Taniguchi, Shinji; Hashimoto, Ken-ya
• Is Part Of: Japanese journal of applied physics. Volume 62:Number SJ(2023)
• Publication Date: 2023-07-01
• Subjects: SAW -- BAW -- nonlinearity -- perturbation analysis -- 2nd order nonlinearity -- FBAR; Physics -- Periodicals; 621.05
• DOI: 10.35848/1347-4065/acb3d0
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: Suppression of nonlinear signal generation in radiofrequency (RF) surface and bulk acoustic wave devices is one of the most important subjects for the RF front-end modules of recent cellular handsets. In particular, issues with second-order nonlinear products of bulk acoustic waves are well known. In this work, we succeeded in extracting the dominant parameters for second-order nonlinear analysis proposed by Hashimoto et al. [Joint Conf. European Frequency and Time Forum and IEEE Freq. Cont. Symp., 2017, p. 538] and verified that it is applicable in a wide frequency range and also effective for film bulk acoustic resonator (FBAR) device design. Combining the extracted nonlinear coefficients on the perturbation analysis by driving near the fundamental frequency ( f 0) and half resonant frequency (1/2 f 0) of the FBAR could reproduce second-order nonlinear characteristics in a wide frequency range. It was also confirmed that the proposed simulations are in good agreement with measurement results for various types of resonators and FBAR filters.