Quartz‐Based Cantilevers: Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System (Adv. Mater. Technol. 3/2021). Issue 3 (8th March 2021)

• Record Type: Journal Article
• Authors: Jolly, Claire; Gomez, Andres; Sánchez‐Fuentes, David; Cakiroglu, Dilek; Rathar, Raïssa; Maurin, Nicolas; Garcia‐Bermejo, Ricardo; Charlot, Benoit; Gich, Martí; Bahriz, Michael; Picas, Laura; Carretero‐Genevrier, Adrian
• Is Part Of: Advanced materials technologies. Volume 6:Issue 3(2021)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2021-03-08
• Subjects: cantilevers -- MEMS -- nanostructuration -- piezoelectricity -- quartz -- silicon -- thin films; Materials science -- Periodicals; Technological innovations -- Periodicals; Materials science; Technological innovations; Periodicals; 620.1105
• DOI: 10.1002/admt.202170014
• Languages: English
• ISSNs: 2365-709X

Abstract

Abstract : In article number 2000831, Adrian Carretero‐Genevrier and co‐workers develop epitaxial nanostructured α‐quartz micro‐cantilevers on silicon, through the combination of soft‐chemistry and top‐down approaches for piezoelectric sensor devices. The α‐quartz MEMS show excellent force and mass sensitivity while preserving the mechanical quality factor. Additionally, the α‐quartz patterned micro‐cantilevers are biocompatible, which rendered cell adhesion and proliferation equivalent to that of conventional glass coverslips.