Piezoelectric Sensors Operating at Very High Temperatures and in Extreme Environments Made of Flexible Ultrawide‐Bandgap Single‐Crystalline AlN Thin Films (Adv. Funct. Mater. 10/2023). (2nd March 2023)

• Record Type: Journal Article
• Authors: Kim, Nam‐In; Yarali, Miad; Moradnia, Mina; Aqib, Muhammad; Liao, Che‐Hao; AlQatari, Feras; Nong, Mingtao; Li, Xiaohang; Ryou, Jae‐Hyun
• Is Part Of: Advanced functional materials. Volume 33:Number 10(2023)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2023-03-02
• Subjects: flexible electronics -- harsh environments -- piezoelectric sensors -- ultrawide‐bandgap single‐crystalline films; Materials -- Periodicals; Chemical vapor deposition -- Periodicals; 620.11
• DOI: 10.1002/adfm.202370056
• Languages: English
• ISSNs: 1616-301X

Abstract

Abstract : Piezoelectric Sensor In article number 2212538, Jae‐Hyun Ryou and co‐workers develop a highly sensitive and mechanically flexible piezoelectric sensor using an ultrawide‐bandgap single‐crystalline AlN semiconductor thin film that can operate at higher than 900 °C. The operation temperature is believed to be amongst the highest for pressure sensors, and the inherent properties of AlN indicate that this approach offers a new solution for sensing in extreme environments often faced in current and next‐generation energy, transportation, and defense applications.