Cite
HARVARD Citation
Hsu, T. et al. (2023). An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators. Journal of micromechanics and microengineering. p. . [Online].
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Hsu, T. et al. (2023). An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators. Journal of micromechanics and microengineering. p. . [Online].