Cite
HARVARD Citation
Allameh, M. et al. (2023). Experimental analysis of a low controlling voltage tri-electrode MEMS electrostatic actuator for array applications. Journal of micromechanics and microengineering. p. . [Online].
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Allameh, M. et al. (2023). Experimental analysis of a low controlling voltage tri-electrode MEMS electrostatic actuator for array applications. Journal of micromechanics and microengineering. p. . [Online].