Cite
HARVARD Citation
Otomo, M. et al. (2023). Chemical states of PVD-ZrS2 film underneath scaled high-k film with self-oxidized ZrO2 film as interfacial layer. Japanese journal of applied physics. p. . [Online].
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Otomo, M. et al. (2023). Chemical states of PVD-ZrS2 film underneath scaled high-k film with self-oxidized ZrO2 film as interfacial layer. Japanese journal of applied physics. p. . [Online].