A graphene pH sensor fabrication process for a nanotechnology laboratory course. Issue 2 (17th May 2022)

• Record Type: Journal Article
• Authors: Suh, Yeonjoon; Wen, Chengyu; Shah, Shrey; Watson, George Patrick
• Is Part Of: Journal of the Society for Information Display. Volume 31:Issue 2(2023)
• Page Start: 77
• Page End: 85
• Publication Date: 2022-05-17
• Subjects: device fabrication -- educational laboratory -- graphene; Information display systems -- Periodicals; 621.38154205
• DOI: 10.1002/jsid.1137
• Languages: English
• ISSNs: 1071-0922

Abstract

Abstract: A laboratory course experiment is described that combines traditional semiconductor fabrication techniques with the application of a nanotechnology‐relevant material, graphene. Sensor devices made with graphene are integrated with a microfluidic device in order to introduce students to new applications of this technology in biology and medicine. The fabrication and test process for a pH sensor is used as a tangible example, exhibiting a changing resistance across graphene strips immersed in different pH buffer solutions. The processing and test equipment required is available in many Si device fabrication educational laboratories. Abstract : A laboratory course experiment is described that combines traditional semiconductor fabrication techniques with the application of a nanotechnology‐relevant material, graphene. The fabrication and test process for a pH sensor is used as a tangible example, where the processing and test equipment required is available in many Si device fabrication educational laboratories.