Cite
HARVARD Citation
Michiels, M. et al. (2023). Insights on film growth conditions on a floating substrate during reactive Ar/O2 bipolar high power impulse magnetron sputter deposition. Journal of physics. p. . [Online].
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Michiels, M. et al. (2023). Insights on film growth conditions on a floating substrate during reactive Ar/O2 bipolar high power impulse magnetron sputter deposition. Journal of physics. p. . [Online].