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Resource‐efficient generation of large‐area micro and nanostructures: High‐quality, large area diffraction gratings originated by diode laser‐driven interference lithography. Issue 1 (24th November 2022)
Record Type:
Journal Article
Title:
Resource‐efficient generation of large‐area micro and nanostructures: High‐quality, large area diffraction gratings originated by diode laser‐driven interference lithography. Issue 1 (24th November 2022)
Main Title:
Resource‐efficient generation of large‐area micro and nanostructures
Abstract: Lasers are widely used in various manufacturing processes. In order to achieve sustainable production, it is important to reduce the environmental impact caused by the laser operation. One major improvement is the step from gas lasers to diode lasers.