(Invited) Graphene Synthesis and Processing on Ge Substrates. (18th August 2016)

• Record Type: Journal Article
• Authors: Lukosius, Mindaugas; Lippert, Gunther; Dabrowski, J; Kitzmann, Julia; Lisker, Marco; Kulse, P; Krüger, Andreas; Fursenko, Oksana; Costina, Ioan; Trusch, Andreas; Yamamoto, Yuji; Wolff, Andre; Mai, Andreas; Schroeder, Thomas; Lupina, Grzegorz
• Is Part Of: ECS transactions. Volume 75:Number 8(2016)
• Page Start: 533
• Page End: 540
• Publication Date: 2016-08-18
• Subjects: Electrochemistry -- Periodicals; Electrochemistry; Periodicals; Electronic journals; Electronic journal; 541.37
• DOI: 10.1149/07508.0533ecst
• Languages: English
• ISSNs: 1938-5862

Abstract

Abstract : We review some of the recent results obtained on the graphene synthesis on Ge(100)/Si(100) substrates by molecular beam epitaxy and wafer scale chemical vapor deposition. We outline some of the identified challenges in synthesis and present first experimental results on patterning and in-line metrology of graphene in a 200 mm wafer pilot line.