Optimization of ALD grown Ni-, Co- and Fe-doped ZnO films. (April 2020)

• Record Type: Journal Article
• Authors: Blagoev, B; Terziyska, P; Mehandzhiev, V; Tzvetkov, P; Kovacheva, D; Avramova, I; Ivanova, T; Gesheva, K; Paskaleva, A
• Is Part Of: Journal of physics. Volume 1492(2020)
• Publication Date: 2020-04
• Subjects: Physics -- Congresses; 530.5
• DOI: 10.1088/1742-6596/1492/1/012053
• Languages: English
• ISSNs: 1742-6588

Abstract

Abstract: Ni-, Co- and Fe-doped ZnO films were grown by atomic layer deposition on Si and glass substrates. The structures prepared were studied and characterized by XRD, XPS, ellipsometry and FTIR. The crystalline ZnO structure showed a strong dependence on the substrate used and the type of transition metal ion despite of the low doping levels.