Cite
HARVARD Citation
Zhou, P. et al. (2023). A quantitative study of removal mechanism of copper polishing based on a single pad-asperity polishing test. International journal of mechanical sciences. p. . [Online].
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Zhou, P. et al. (2023). A quantitative study of removal mechanism of copper polishing based on a single pad-asperity polishing test. International journal of mechanical sciences. p. . [Online].