Pulsed laser deposition of high-quality diamond-like carbon films under an inhomogeneous magnetic field. Issue 1 (January 2021) - Huang, Guojun
Abstract: High-quality diamond-like carbon film was deposited on silicon substrate by magnetic field-enhanced pulsed laser deposition. The motion tracks of carbon ions in the inhomogeneous magnetic field were simulated. The thickness and surface morphology of carbon film were characterized by surface profilometer and atomic force microscopy, respectively. Mechanical property was evaluated by an indenter. The results showed that the deposition rate of the carbon film prepared under the magnetic field increased 1.7 times than that of the carbon film without magnetic field. The surface of the carbon films constructed of columnar particle arrays with the size ranging from 20 nm to 30 nm was improved and the roughness was decreased from 3.22 nm to 0.93 nm. The nano-hardness of the carbon film was 53.4 GPa, which increased by 18.1% than that of carbon film deposited without magnetic field. The experiment and simulation on the magnetic field-enhanced pulsed laser deposition proved that the new method of film preparation by magnetic filtration laser plasma deposition is feasibility.