(Invited) Insights into the UV-C Optical Absorption of AlN Substrates Grown by PVT. (8th September 2020)

• Record Type: Journal Article
• Authors: Dalmau, Rafael; Britt, Jeffrey; Schlesser, Raoul
• Is Part Of: ECS transactions. Volume 98:Number 6(2020)
• Page Start: 3
• Page End: 11
• Publication Date: 2020-09-08
• Subjects: Electrochemistry -- Periodicals; Electrochemistry; Periodicals; Electronic journals; Electronic journal; 541.37
• DOI: 10.1149/09806.0003ecst
• Languages: English
• ISSNs: 1938-5862

Abstract

Abstract : The structural and optical properties of 2-inch AlN substrates grown by physical vapor transport were assessed. Ultraviolet transmittance and absolute reflectance spectra were measured spectrophotometrically. Accurate absorption coefficients were calculated with a method accounting for reflection losses. Production of high-quality, macrodefect-free AlN substrates possessing absorption coefficients at 265 nm with values from 30 to 50 cm -1 was demonstrated.