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HARVARD Citation
Zhang, Z. et al. (2023). Simulation of hollow-cathode-nitriding plasma and design of diffusion equipment with DC and RF dual discharge. Physica scripta. p. . [Online].
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Zhang, Z. et al. (2023). Simulation of hollow-cathode-nitriding plasma and design of diffusion equipment with DC and RF dual discharge. Physica scripta. p. . [Online].