Enhanced mechanical properties of CrN coatings by plasma immersion ion implantation and deposition. Issue 4 (15th February 2023)

• Record Type: Journal Article
• Authors: Liu, Liangliang; Li, Tijun; Ruan, Qingdong; Li, Dan; Huang, Chao; Zhang, Xiaolin; Ma, Yinghe; Wu, Yuzheng; Wu, Zhongcan; Fu, RickyK.Y.; Wu, Zhongzhen; Chu, Paul K.
• Is Part Of: Ceramics international. Volume 49:Issue 4(2023)
• Page Start: 6713
• Page End: 6719
• Publication Date: 2023-02-15
• Subjects: Crystal defects -- Ion energy -- CrN coatings -- Mechanical properties -- PIII&D -- Plasma immersion ion implantation and deposition; Ceramics -- Periodicals; Céramique industrielle -- Périodiques; Ceramics; Periodicals; Electronic journals; 666
• DOI: 10.1016/j.ceramint.2022.10.215
• Languages: English
• ISSNs: 0272-8842

Abstract

Abstract: Crystal defects can enhance the properties of materials without changing the composition but introduction of high-density defects in coatings is challenging. Herein, plasma immersion ion implantation and deposition (PIII&D) is employed to produce high-density crystal defects in CrN coatings to improve the mechanical properties. PIII&D is demonstrated to introduce high-density point defects and stacking faults into the CrN coatings, especially at a bias exceeding 10 kV. The dislocation density significantly increased from 5.2 × 10 14 /m 2 to 1.3 × 10 17 /m 2 . In addition, the covered area of defects increased from 30% to 75% with the ion implantation. As a result, the hardness increases significantly from 24.2 GPa to 35.6 GPa, while the fracture toughness is not compromised.