Analysis of subsurface damage inhibition in magnetization-enhanced force-rheological polishing. (January 2023)

• Record Type: Journal Article
• Authors: Zhou, Dong-Dong; Huang, Xiang-Ming; Li, Xi-Yang; Ming, Yang
• Is Part Of: Tribology international. Volume 179(2023)
• Publication Date: 2023-01
• Subjects: Aspheric SiC mould -- Magnetisation-enhanced force-rheological polishing -- Subsurface-damage depth prediction model -- Subsurface-damage minimum threshold; Tribology -- Periodicals; 621.89
• DOI: 10.1016/j.triboint.2022.108105
• Languages: English
• ISSNs: 0301-679X

Abstract

Abstract: Subsurface damage (SSD) during polishing silicon carbide (SiC) is an unavoidable problem in mould production. However, studies on the law of SSD generation in the magnetisation-enhanced force-rheological polishing process are limited. An SSD depth prediction model is established considering factors such as strain rate effect, elastic-plastic deformation, and dynamic changes in mechanical properties. A detection technology for the SSD depth of aspheric mould was proposed, and the influence mechanism of orthogonal tests on the SSD state of SiC mould was studied. The results show that the maximum deviation between the calculated and experimental results is less than 7%. The SSD depth dropped to the minimum threshold (< 0.5 µm) under a specific combination of parameters. Graphical Abstract: ga1 Highlights: Subsurface damage depth prediction model to explore subsurface damage generation law. Proposed a detection technology for subsurface damage depth of aspheric mould. Deviation between the calculated (model) and experimental results is less than 7%. Subsurface damage depth drops to the minimum threshold (< 0.5 µm).