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HARVARD Citation
Preuß, A. et al. (2020). Ruthenium(II) MOCVD Precursors for Phosphorus‐Doped Ruthenium Layer Formation. European journal of inorganic chemistry. pp. 1612-1623. [Online].
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Preuß, A. et al. (2020). Ruthenium(II) MOCVD Precursors for Phosphorus‐Doped Ruthenium Layer Formation. European journal of inorganic chemistry. pp. 1612-1623. [Online].