MEMS Rogowski coil current sensor with spiral return coil. Issue 4 (19th October 2022)

• Record Type: Journal Article
• Authors: Watanabe, Yoshiyuki; Kato, Mutsuto; Yahagi, Toru; Murayama, Hiroki; Yamada, Naoya; Yoshida, Kenichi; Maehara, Kenichi; Fukuda, Yusuke; Sashida, Kazuyuki; Ikeda, Katsuya; Ikeda, Kosuke; Takemori, Toshiyuki
• Is Part Of: Electrical engineering in Japan. Volume 215:Issue 4(2022)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2022-10-19
• Subjects: current sensor -- MEMS -- return coil -- Rogowski coil -- TSV; Electrical engineering -- Periodicals; 621.30952
• DOI: 10.1002/eej.23408
• Languages: English
• ISSNs: 0424-7760

Abstract

Abstract: We have developed a MEMS Rogowski coil current sensor with spiral return coil. The Rogowski coil is formed on a silicon substrate clockwise and counterclockwise from the edges, for current detection and external magnetic noise compensation (device size 10 × 10 × 0.3 mm 3, spiral coil 135 turns, via diameter 100 μm). When the slew rate ( di / dt ) was kept constant at 10 A/μs, and the current was changed by 5 A up to 40 A, MEMS Rogowski coil could detect current linearly. When the slew rate was changed by 10 A/μs up to 100 A/μs, it was found that the MEMS Rogowski coil could detect current almost linearly following the reference sensor. Hence, external noise compensation by the return coil has been confirmed.