Cite
HARVARD Citation
Nagano, A. et al. (2022). Microfabrication of surface acoustic wave devices with AlN thin film deposited on half‐inch quartz wafer. Electrical engineering in Japan. 215 (4), p. n/a. [Online].
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Nagano, A. et al. (2022). Microfabrication of surface acoustic wave devices with AlN thin film deposited on half‐inch quartz wafer. Electrical engineering in Japan. 215 (4), p. n/a. [Online].