Cite
HARVARD Citation
Liao, P. et al. (2022). Partial decarboxylation of hafnium oxide clusters for high resolution lithographic applications. Journal of materials chemistry. 10 (41), pp. 15647-15655. [Online].
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Liao, P. et al. (2022). Partial decarboxylation of hafnium oxide clusters for high resolution lithographic applications. Journal of materials chemistry. 10 (41), pp. 15647-15655. [Online].