A class imbalanced wafer defect classification framework based on variational autoencoder generative adversarial network. (1st February 2023)

• Record Type: Journal Article
• Authors: Wang, Yitian; Wei, Yuxiang; Wang, Huan
• Is Part Of: Measurement science & technology. Volume 34:Number 2(2023)
• Publication Date: 2023-02-01
• Subjects: wafer map -- wafer defects classification -- variational autoencoder -- generative adversarial network; Physical measurements -- Periodicals; Scientific apparatus and instruments -- Periodicals; Equipment and Supplies -- Periodicals; Science -- instrumentation -- Periodicals; Technology -- instrumentation -- Periodicals; Mesures physiques -- Périodiques; Physical measurements; Scientific apparatus and instruments; Periodicals; 502.87
• DOI: 10.1088/1361-6501/ac9ed3
• Languages: English
• ISSNs: 0957-0233

Abstract

Abstract: Wafer defect classification (WDC) can be crucial to the wafer fabrication process. Engineers can quickly respond to improve the technological process, averting further defects through WDC. However, due to the complex fabrication steps, wafer defects are different in various types. This causes a severe data imbalance problem in WDC. To effectively solve the problem, this study introduces a class imbalanced WDC based on Variational Autoencoder Generative Adversarial Network (VAE-GAN). This framework consists of VAE-GAN and wafer defect classifier. Among them, VAE-GAN is responsible for creating new samples to solve the imbalance problem while the classifier is responsible for classifying wafer defect patterns. Specifically, VAE-GAN combines the advantage of a Variational Autoencoder (VAE) and generative adversarial network. VAE networks can produce subtle differences that do not affect the properties of the data when generating new images. At the same time, the proposed discriminator can help us constrain the generated images to be close to real samples and avoid irrational, feature-missing, and ambiguous samples. WM-811 K dataset is utilized to verify the above method. The experimental results validate that the samples generated by VAE-GAN have a significant improvement in the performance of the WDC system.