Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layer. (1st November 2022)

• Record Type: Journal Article
• Authors: Xu, Yuhang; Lu, Fei; Liu, Yifan; Ma, Changdong
• Is Part Of: Materials research express. Volume 9:Number 11(2022)
• Publication Date: 2022-11-01
• Subjects: graphene -- direct synthesis -- lithium niobate substrate -- carbon ion implantation -- copper film -- annealing; Materials science -- Research -- Periodicals; Materials science -- Periodicals; 620.11
• DOI: 10.1088/2053-1591/ac9f03
• Languages: English
• ISSNs: 2053-1591

Abstract

Abstract: We directly synthesized multi-layer graphene with an area of several hundred square microns on the lithium niobate (LN, LiNbO3 ) substrate by Carbon (C) implantation into the copper (Cu)-covered LiNbO3 . The energy of C ion implantation was optimized per SRIM simulation to ensure that the distribution of C covers the Cu/LiNbO3 interface. The optimized energy was established at 55 keV, such that the formation of C peaks in the respective materials on each side of the Cu/LiNbO3 interface. The diffusion of the accumulated C to the Cu/LiNbO3 interface can form a more uniform C distribution at the interface, which is beneficial to the synthesis of graphene. Following the annealing process and removal of the Cu coating, a multi-layer graphene with an area of several hundred square microns on the surface of LiNbO3 was identified and characterized using Scanning Electron Microscopy (SEM), Energy-Dispersive x-ray Spectroscopy (EDS), Raman spectroscopy, and Atomic Force Microscopy (AFM). This remarkable advancement encourages the industrialization of direct graphene synthesis on LiNbO3 substrates via ion implantation.