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HARVARD Citation
El Farsy, A. et al. (2022). On the correlation between the TiN thin film properties and the energy flux of neutral sputtered atoms in direct current magnetron discharge. Journal of physics. p. . [Online].
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El Farsy, A. et al. (2022). On the correlation between the TiN thin film properties and the energy flux of neutral sputtered atoms in direct current magnetron discharge. Journal of physics. p. . [Online].