Cite
HARVARD Citation
Kumagai, Y. et al. (2022). Influence of growth rate on homoepitaxial growth of AlN at 1450 °C by hydride vapor phase epitaxy. Applied physics express. p. . [Online].
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Kumagai, Y. et al. (2022). Influence of growth rate on homoepitaxial growth of AlN at 1450 °C by hydride vapor phase epitaxy. Applied physics express. p. . [Online].