A comparative analysis on alternative air-conditioning systems for high-tech cleanrooms and their performance in different climate zones. (15th December 2022)

• Record Type: Journal Article
• Authors: Zhao, Wenxuan; Li, Hangxin; Wang, Shengwei
• Is Part Of: Energy. Volume 261:Part B(2022)
• Publication Date: 2022-12-15
• Subjects: High-tech cleanroom -- Air-conditioning system -- Energy performance -- Economic analysis -- Climate impact; Power resources -- Periodicals; Power (Mechanics) -- Periodicals; Energy consumption -- Periodicals; 333.7905
• DOI: 10.1016/j.energy.2022.125284
• Languages: English
• ISSNs: 0360-5442

Abstract

Abstract: The strict requirements on temperature, humidity and particle concentration cause cleanrooms to consume enormous energy today, with global power consumption at the same magnitude of data centers. As the most energy-intensive representative, the high-tech cleanroom consumes nearly three times as much energy as the data center, but receives far less attention. Proper design and control of air-conditioning systems for high-tech cleanrooms are key issues to reduce their energy use while ensuring the required built environment. In this study, the existing alternative air-conditioning systems for high-tech cleanrooms are categorized into three typical types according to decoupling degree. Their energy and economic performance, and applicable situations are systematically assessed and analyzed under the full range of climatic conditions using the EnergyPlus/Matlab platform. Results show that the "fully decoupled" MAU (make-up air handling unit) +DCC (dry cooling coil) +FFU (fan filter unit) system is the most energy-efficient and cost-efficient system, which can achieve 39.2–79.6% energy savings compared with the conventional coupled systems. This system also presents higher energy-saving potential in hot and mild climates, with short dynamic payback periods (<0.7 year) for retrofitting existing coupled systems. Besides, guidance and recommendations for system/site selections of large-scale high-tech manufacturing fabs are provided. Graphical abstract: Image 1 Highlights: The alternative air-conditioning systems for high-tech cleanrooms are categorized. The energy and economic performance of the three typical systems is evaluated. The fully decoupled system offers superior performance over full range of climates. The fully decoupled system can achieve significant energy saving in hot/mild zones. Recommendations for site/system selections and existing system retrofit are provided.