Optical metasurfaces made by cell projection lithography: Electron beam nanopatterning with high optical quality on large areas. Issue 5 (27th August 2022)

• Record Type: Journal Article
• Authors: Hädrich, Mathias; Siefke, Thomas; Banasch, Michael; Zeitner, Uwe D.
• Is Part Of: PhotonicsViews. Volume 19:Issue 5(2022)
• Page Start: 28
• Page End: 31
• Publication Date: 2022-08-27
• Subjects: Photonics -- Periodicals; Optics -- Periodicals; Lasers -- Periodicals; 621.36; 621.36
• DOI: 10.1002/phvs.202200036
• Languages: English
• ISSNs: 2626-1294

Abstract

Abstract: Metasurfaces offer promising possibilities for emerging photonic applications like see‐through, near‐eye displays. Vistec Electron Beam lithography systems with variable shaped beam (VSB) and cell projection (CP) technology provide a flexible solution to generate repetitive structures on large substrates. Excellent pattern fidelity is achieved in a feasible write‐time, enabling prototyping or the manufacturing of replication masters.