Cite
HARVARD Citation
Donges, J. et al. (2022). Machine learning enhanced in situ electron beam lithography of photonic nanostructures. Nanoscale. 14 (39), pp. 14529-14536. [Online].
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Donges, J. et al. (2022). Machine learning enhanced in situ electron beam lithography of photonic nanostructures. Nanoscale. 14 (39), pp. 14529-14536. [Online].