Cite
HARVARD Citation
Schroedter, R. et al. (2020). Capacitive Charge-based Self-Sensing for Resonant Electrostatic MEMS mirrors. IFAC-PapersOnLine. 53 (2), pp. 8553-8558. [Online].
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Schroedter, R. et al. (2020). Capacitive Charge-based Self-Sensing for Resonant Electrostatic MEMS mirrors. IFAC-PapersOnLine. 53 (2), pp. 8553-8558. [Online].