Study of a pulsed post‐discharge plasma deposition process of APTES: synthesis of highly organic pp‐APTES thin films with NH2 functionalized polysilsesquioxane evidences. Issue 4 (25th January 2019)

• Record Type: Journal Article
• Authors: Bulou, Simon; Lecoq, Elodie; Loyer, François; Frache, Gilles; Fouquet, Thierry; Gueye, Magamou; Belmonte, Thierry; Choquet, Patrick
• Is Part Of: Plasma processes and polymers. Volume 16:Issue 4(2019)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2019-01-25
• Subjects: microwave discharges -- plasma‐enhanced chemical vapour deposition (PECVD) -- plasma polymerization -- pulsed discharges -- remote plasma processes; Plasma polymerization -- Periodicals; Plasma-enhanced chemical vapor deposition -- Periodicals; Plasma chemistry -- Periodicals
• DOI: 10.1002/ppap.201800177
• Languages: English
• ISSNs: 1612-8850

Abstract

Abstract : This article reports the use of pulsed remote Ar‐O2 microwave plasma assisted chemical vapor deposition with an −NH2 containing organosilicon precursor ((3‐Aminopropyl)triethoxysilane: APTES). It is shown that modifying the plasma pulses duration ( t on ) and the plasma off duration ( t off ) allows to finely tune the deposited layer composition. In addition, the results of this work demonstrate that an important film growth occurs during t off, which results in an increased −NH2 density. Besides, high resolution MALDI‐ORBITRAP Mass spectrometry analysis clearly points out that APTES oligomers up to eight base units, including silsesquioxanes (cages), and cyclosiloxanes (rings) molecules with intact −NH2 groups are embedded into the as grown pp‐APTES thin film. Abstract : Pulsed remote microwave PACVD of APTES is investigated. Modifying the "plasma off" duration allows to tune the coating composition. In addition, a significant film growth occurs during "plasma off, " resulting in an increased −NH2 density and less cross‐linked structure. APTES oligomers up to 8 base units, including silsesquioxanes (cages) and cyclosiloxanes (rings) molecules with intact −NH2 groups are also detected.