Large Arrays and Properties of 3‐Terminal Graphene Nanoelectromechanical Switches. (12th December 2013)

• Record Type: Journal Article
• Authors: Liu, Xinghui; Suk, Ji Won; Boddeti, Narasimha G.; Cantley, Lauren; Wang, Luda; Gray, Jason M.; Hall, Harris J.; Bright, Victor M.; Rogers, Charles T.; Dunn, Martin L.; Ruoff, Rodney S.; Bunch, J. Scott
• Is Part Of: Advanced materials. Volume 26:Number 10(2014)
• Page Start: 1571
• Page End: 1576
• Publication Date: 2013-12-12
• Subjects: graphene -- nanoelectromechanical systems -- microsystems -- nanomechanical switches -- finite element analysis; Materials -- Periodicals; Chemical vapor deposition -- Periodicals; 620.11
• DOI: 10.1002/adma.201304949
• Languages: English
• ISSNs: 0935-9648

Abstract

Abstract : Large arrays of 3‐terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non‐linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.