Enhanced heating in plasma bulk due to electron cyclotron resonance in weakly magnetized capacitively coupled plasmas. (1st July 2022)

• Record Type: Journal Article
• Authors: Zhang, Quan-Zhi; Liu, Jia-Rui; Liu, Yong-Xin; Lu, Wen-Qi; Sun, Jing-Yu; Wang, You-Nian
• Is Part Of: Plasma sources science & technology. Volume 31:Number 7(2022)
• Publication Date: 2022-07-01
• Subjects: radio frequency -- magnetized capacitively coupled plasmas -- electron cyclotron resonance; Plasma (Ionized gases) -- Periodicals; 530.44
• DOI: 10.1088/1361-6595/ac7903
• Languages: English
• ISSNs: 0963-0252

Abstract

Abstract: An enhanced electron heating mechanism based on a resonance between the cyclotron motion of electrons and radio frequency (rf) electric field in the plasma bulk is reported in weakly magnetized capacitively coupled argon plasmas at low pressure. When the electron cyclotron frequency coincides with the applied power source frequency, the bulk electrons can continuously acquire energy from the background electric field within certain rf periods during the cyclotron motion, inducing overall distinct increase of excitation rate and electron temperature in the plasma bulk. This enhanced electron heating effect has been examined by a combination of kinetic particle simulations, experimental measurements, and an analytical model, and the dynamics of electrons are revealed at resonant conditions.