Full-Wave Analysis of Ultrahigh Electromechanical Coupling Surface Acoustic Wave Propagating Properties in a Relaxor Based Ferroelectric Single Crystal/Cubic Silicon Carbide Layered Structure. (16th October 2017)

• Record Type: Journal Article
• Authors: Ji, Xiaojun; Xiao, Qiang; Chen, Jing
• Other Names: Qiu Zhiping Academic Editor.
• Is Part Of: Modelling and simulation in engineering. Volume 2017(2017)
• Publication Date: 2017-10-16
• Subjects: Engineering -- Simulation methods -- Periodicals; Engineering -- Mathematical models -- Periodicals; 620.004
• DOI: 10.1155/2017/7078383
• Languages: English
• ISSNs: 1687-5591

Abstract

Abstract : This paper describes a full-wave analysis of ultrahigh electromechanical coupling surface acoustic wave (SAW) of Y-cut X propagating Pb(In1/2 Nb1/2 )O3 -Pb(Mg1/3 Nb2/3 )O3 -PbTiO3 (YX-PIMNT) single crystals on a cubic silicon carbide (3C-SiC) substrate. There are several eigenmodes including shear horizontal (SH) and Rayleigh SAWs. Based on the finite-element method (FEM), the phase velocity (v p ) and coupling factor (K 2 ) of SAWs varying with the top electrode thickness, thickness, and Euler angle (θ ) of the YX-PIMNT substrate have been investigated. K 2 of SH SAW can reach an extremely high value of 75.9%. The proper control of structural parameters can suppress unwanted responses caused by other modes without deteriorating the coupling factor. The large K 2 value of SH SAW and suppression of unwanted responses have highly promising applications in developing ultrawideband and tunable SAW filters. Finally, the performance of 3C-SiC and 6H-SiC as substrates was investigated, and 3C-SiC was identified as a more attractive substrate candidate than 6H-SiC.