Automated calibration of model-driven reconstructions in atom probe tomography. (15th September 2022)

• Record Type: Journal Article
• Authors: Fletcher, Charles; Moody, Michael P; Fleischmann, Claudia; Dialameh, Masoud; Porret, Clement; Geiser, Brian; Haley, Daniel
• Is Part Of: Journal of physics. Volume 55:Number 37(2022)
• Publication Date: 2022-09-15
• Subjects: atom probe tomography -- semiconductor imaging -- level set method -- field evaporation -- data reconstruction -- optimisation -- correlative microscopy; Physics -- Periodicals; 530
• DOI: 10.1088/1361-6463/ac7986
• Languages: English
• ISSNs: 0022-3727

Abstract

Abstract: Traditional reconstruction protocols in atom probe tomography frequently feature image distortions for multiphase materials, due to inaccurate geometric assumptions regarding specimen evolution. In this work, the authors' outline a new reconstruction protocol capable of correcting for many of these distortions. This new method uses predictions from a previously developed physical model for specimen field evaporation. The application of this new model-driven approach to both an experimental semiconductor multilayer system and a fin field-effect transistor device (finFET) is considered. In both systems, a significant reduction in multiphase image distortions when using this new algorithm is clearly demonstrated. By being able to quantitatively compare model predictions with experiment, such a method could also be applied to testing and validating new developments in field evaporation theory.