Cite
HARVARD Citation
Boysen, N. et al. (2021). Atomic layer deposition of dielectric Y2O3 thin films from a homoleptic yttrium formamidinate precursor and water. RSC advances. 11 (5), pp. 2565-2574. [Online].
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Boysen, N. et al. (2021). Atomic layer deposition of dielectric Y2O3 thin films from a homoleptic yttrium formamidinate precursor and water. RSC advances. 11 (5), pp. 2565-2574. [Online].