AlN film SAW resonator integrated with metal structure. Issue 5 (1st March 2015)

• Record Type: Journal Article
• Authors: Shu, Lin; Jiang, Jianying; Peng, Bin; Wang, Yu; Liu, Xingzhao
• Is Part Of: Electronics letters. Volume 51:Issue 5(2015)
• Page Start: 379
• Page End: 380
• Publication Date: 2015-03-01
• Subjects: surface acoustic wave resonators -- thin film devices -- aluminium compounds -- wide band gap semiconductors -- sputter deposition -- titanium alloys; surface acoustic wave resonator -- integrated SAW resonator -- metal substrate -- aluminium nitride thin films -- midfrequency magnetron sputtering -- TC4 titanium alloy substrates -- resonance frequency -- electromechanical coupling coefficient -- strain sensor -- metal structure health monitoring -- frequency 129 MHz -- AlN; Electronics -- Periodicals; 621.381
• DOI: 10.1049/el.2014.3495
• Languages: English
• ISSNs: 0013-5194

Abstract

Abstract : A novel surface acoustic wave (SAW) resonator integrated on a metal substrate is presented. The devices were fabricated on the aluminium nitride (AlN) thin films deposited by mid‐frequency magnetron sputtering on polished TC4 titanium alloy substrates. Using a two‐step growth method, AlN film with a full‐width at half‐maximum of 4.1° had been prepared. The AlN film SAW resonator shows a resonance frequency of 129 MHz and an electromechanical coupling coefficient of 0.28%. The measurement results agree well with the simulation results. This integrated SAW resonator can be used as a good strain sensor in metal structure health monitoring.