Cite
HARVARD Citation
Chen, H. et al. (2022). A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance. Journal of micromechanics and microengineering. p. . [Online].
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Chen, H. et al. (2022). A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance. Journal of micromechanics and microengineering. p. . [Online].