Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering. (15th October 2022)

• Record Type: Journal Article
• Authors: Jaszewski, Samantha T.; Hoglund, Eric R.; Costine, Anna; Weber, Marc H.; Fields, Shelby S.; Sales, Maria Gabriela; Vaidya, Jaykumar; Bellcase, Leah; Loughlin, Katie; Salanova, Alejandro; Dickie, Diane A.; Wolfley, Steven L.; Henry, M. David; Maria, Jon-Paul; Jones, Jacob L.; Shukla, Nikhil; McDonnell, Stephen J.; Reinke, Petra; Hopkins, Patrick E.; Howe, James M.; Ihlefeld, Jon F.
• Is Part Of: Acta materialia. Volume 239(2022)
• Publication Date: 2022-10-15
• Subjects: Materials -- Periodicals; Materials science -- Periodicals; Materials -- Mechanical properties -- Periodicals; Metallurgy -- Periodicals; Chemistry, Inorganic -- Periodicals; 620.112
• DOI: 10.1016/j.actamat.2022.118220
• Languages: English
• ISSNs: 1359-6454

Abstract

Graphical abstract: Image, graphical abstract