Fabrication and simulation study for vertical micro-TEGs based on printed circuit board manufacturing processes. (1st October 2022)

• Record Type: Journal Article
• Authors: Sherkat, Negin; Kattiparambil Sivaprasad, Athira; Pelz, Uwe; Woias, Peter
• Is Part Of: Smart materials and structures. Volume 31:Number 10(2022)
• Publication Date: 2022-10-01
• Subjects: micro thermoelectric generator -- microfabrication technology -- thermoelectric simulation study -- printed circuit board (PCB) -- contact resistance measurement -- µTEG evaluation -- contact resistance simulation; Smart materials -- Periodicals; Strucural design -- Periodicals; 620.11
• DOI: 10.1088/1361-665X/ac8dcd
• Languages: English
• ISSNs: 0964-1726

Abstract

Abstract: The development of fabrication procedures for micro-thermoelectric generators ( µ TEGs) based on low-cost fabrication technologies, appropriate for mass production is discussed and demonstrated in this study. Simulations were carried out, two manufacturing processes were tested, and device performance is compared to simulation results for vertical µ TEGs. The substrate for this device is a printed circuit board, and the thermoelectric materials are self-developed Bi0.5 Sb1.5 Te3 (p-type) and Bi2 Te2.7 Se0.3 (n-type) pastes. A square µ TEG (15 mm × 15 mm × 500 µ m) with eight thermocouples (TCs) was fabricated. The characterization of the fabricated 8-TC- µ TEG was carried out and a power output of 1.23 µ W was obtained for the fabricated 8-TC- µ TEG. The measurement results of this 8-TC- µ TEG closely match simulation results as well. Moreover, a novel vertical electrical contact resistance measurement setup is designed and implemented into the final evaluation of µ TEG production to have a more accurate assessment. The simulation study is also applied for the designed electrical contact resistance measurement setup. As a result, the contact resistivity of Bi2 Te3 /Cu was calculated as 5.65 × 10 −4 Ωcm 2 .