Cite
HARVARD Citation
Silva, J. et al. (2021). Pattern transferring of Prolift-100 polymer sacrificial layers with controlled sidewall profile. Journal of micromechanics and microengineering. p. . [Online].
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Silva, J. et al. (2021). Pattern transferring of Prolift-100 polymer sacrificial layers with controlled sidewall profile. Journal of micromechanics and microengineering. p. . [Online].