Microstructural evolution and tribology of Mo-doped diamond like carbon nanocomposite film. (October 2022)

• Record Type: Journal Article
• Authors: Su, Yongyao; Huang, Weijiu; Cai, Lixin; Gong, Xiaohong; Zhang, Tengfei; Hu, Rong; Zhang, Peng; Ruan, Haibo
• Is Part Of: Tribology international. Volume 174(2022)
• Publication Date: 2022-10
• Subjects: Mo content -- Nanocrystals -- Tribology -- Diamond-like carbon; Tribology -- Periodicals; 621.89
• DOI: 10.1016/j.triboint.2022.107774
• Languages: English
• ISSNs: 0301-679X

Abstract

Abstract: To explore the microstructure and tribology property evolution of diamond-like carbon (DLC) film with variable Mo concentrations, Mo-doped DLC films were prepared by magnetron sputtering equipment. The results showed that the Mo concentration in the DLC films increased from 2.1 to 30 at% with the Ar/C2 H2 gas flow ratio (3:1–9:1). Mo was dispersed in DLC film at a low doping concentration (2.1 at%). Moreover, MoC nanocrystals were present, and a nanocrystal/amorphous microstructure was formed at a high doping concentration (≥8.3 at%). The DLC films with 2.1 at% Mo showed the best adhesion (200 mN) and the minimum wear rate (1.47 × 10 −8 mm 3 / N·m), and high Mo concentration (≥8.3 at%) was detrimental to wear resistance and adhesion. Highlights: Mo-doped DLCs were prepared on the high-speed steel by magnetron sputtering. Trace Mo (2.1 at%) doping relaxes internal stress and improves the adhesion of DLC film. The state of Mo in DLC film was determined by its contents. DLC film with 2.1 at% of Mo-doping exhibited excellent wear resistance owing to the stable transfer layer.