Low‐Thermal‐Budget Fluorite‐Structure Ferroelectrics for Future Electronic Device Applications. Issue 5 (17th May 2021)

• Record Type: Journal Article
• Authors: Kim, Hyo Jeong; An, Yonghwan; Jung, Yong Chan; Mohan, Jaidah; Yoo, Jeong Gyu; Kim, Young In; Hernandez-Arriaga, Heber; Kim, Harrison Sejoon; Kim, Jiyoung; Kim, Si Joon
• Is Part Of: Physica status solidi. Volume 15:Issue 5(2021)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2021-05-17
• Subjects: Solid state physics -- Periodicals; 530.4105
• DOI: 10.1002/pssr.202170020
• Languages: English
• ISSNs: 1862-6254

Abstract

Abstract : In article number 2100028, Jiyoung Kim, Si Joon Kim, and co‐workers comprehensively review the various factors such as doping effects, deposition method, annealing method and conditions, and substrate material for obtaining fluorite‐structure ferroelectrics with low‐thermal‐budget processes (400 °C or less). These low‐thermal‐budget processes facilitate not only the integration of ferroelectric circuits in the back‐end‐of‐line, but also the applications to flexible and wearable electronics.