Phase control of sputter-grown large-area MoTe2 films by preferential sublimation of Te: amorphous, 1T′ and 2H phases. Issue 29 (12th July 2022)

• Record Type: Journal Article
• Authors: Hatayama, Shogo; Saito, Yuta; Makino, Kotaro; Uchida, Noriyuki; Shuang, Yi; Mori, Shunsuke; Sutou, Yuji; Krbal, Milos; Fons, Paul
• Is Part Of: Journal of materials chemistry. Volume 10:Issue 29(2022)
• Page Start: 10627
• Page End: 10635
• Publication Date: 2022-07-12
• Subjects: Materials -- Periodicals; Chemistry, Analytic -- Periodicals; Optical materials -- Research -- Periodicals; Electronics -- Materials -- Research -- Periodicals; 543.0284
• DOI: 10.1039/d2tc01281b
• Languages: English
• ISSNs: 2050-7526

Abstract

Abstract : The crystallization mechanism of sputter-deposited amorphous Mo–Te film is revealed enabling the large-area growth of 2D materials. Abstract : Sputter-grown amorphous Mo–Te films were annealed to obtain the crystalline phase. Although as-deposited films exhibited an off-stoichiometric Te-rich composition, optimized annealing conditions enabled the elimination of excess Te by a preferential sublimation process. Owing to their similar local structure, the disordered amorphous phase first crystallized into a high temperature phase, 1T′, followed by a phase transition to the 2H structure upon further annealing. To realize 2D MoTe2 -based novel devices, understanding the crystallization mechanism of amorphous Mo–Te films is critical. Furthermore, the robustness of the fabrication method, i.e., the establishment of a method to realize MoTe2 single-phase formation, which does not require the initial composition of the as-deposited amorphous film to be exactly stoichiometric, will greatly contribute to the deposition of large-area MoTe2 films essential for industrial applications.