Design and fabrication of an electrochemical chip for liquid-phase transmission electron microscopy. (4th May 2022)

• Record Type: Journal Article
• Authors: Sasaki, Yuki; Mizushima, Ayako; Mita, Yoshio; Yoshida, Kaname; Kuwabara, Akihide; Ikuhara, Yuichi
• Is Part Of: Microscopy. Volume 71:Number 4(2022)
• Page Start: 238
• Page End: 241
• Publication Date: 2022-05-04
• Subjects: MEMS -- in situ -- LP-TEM -- electrochemical deposition -- Zn -- fabrication; Microscopy -- Periodicals; 502.825
• DOI: 10.1093/jmicro/dfac023
• Languages: English
• ISSNs: 2050-5698

Abstract

Abstract: Liquid-phase transmission electron microscopy (LP-TEM) can be used with an electrochemical chip (e-chip) to observe electrochemical reactions in a liquid in situ . The design of electrodes on an e-chip fabricated using microelectromechanical system technology cannot be easily changed. Here, we report a newly designed e-chip and its fabrication process. Electrodes with a desired shape were fabricated with various metals via an additional step of vacuum deposition onto our e-chip with a shadow mask. For precise control of the electrochemical reactions in LP-TEM, optimization of the electrode shape and material is critical.