(Invited)3D Monolithic Integration. (10th April 2018)
- Record Type:
- Journal Article
- Title:
- (Invited)3D Monolithic Integration. (10th April 2018)
- Main Title:
- (Invited)3D Monolithic Integration
- Authors:
- Brunet, Laurent
Batude, Perrine
Fenouillet-Beranger, Claire
Vinet, Maud - Abstract:
- Abstract : 3D Monolithic Integration with ultra-small 3D contact pitch (<100nm) offers new 3D partitioning options at fine granularities. This paper reviews potential applications ranging from computing to sensor interface and gives an update on 3DSI device development.
- Is Part Of:
- ECS transactions. Volume 85:Number 8(2018)
- Journal:
- ECS transactions
- Issue:
- Volume 85:Number 8(2018)
- Issue Display:
- Volume 85, Issue 8 (2018)
- Year:
- 2018
- Volume:
- 85
- Issue:
- 8
- Issue Sort Value:
- 2018-0085-0008-0000
- Page Start:
- 125
- Page End:
- 130
- Publication Date:
- 2018-04-10
- Subjects:
- Electrochemistry -- Periodicals
Electrochemistry
Periodicals
Electronic journals
Electronic journal
541.37 - Journal URLs:
- http://ecsdl.org/ECST/ ↗
http://rzblx1.uni-regensburg.de/ezeit/warpto.phtml?colors=7&jour_id=81944 ↗
https://iopscience.iop.org/journal/1938-5862 ↗
http://www.electrochem.org/ ↗ - DOI:
- 10.1149/08508.0125ecst ↗
- Languages:
- English
- ISSNs:
- 1938-5862
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 22795.xml