Cite
HARVARD Citation
Mu, Y. et al. (2016). Mean Residence Time and Dispersion Number Associated with Slurry Injection Methods in Chemical Mechanical Planarization. ECS journal of solid state science and technology. pp. P155-P159. [Online].
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Mu, Y. et al. (2016). Mean Residence Time and Dispersion Number Associated with Slurry Injection Methods in Chemical Mechanical Planarization. ECS journal of solid state science and technology. pp. P155-P159. [Online].